Gas flow rate dependence of the discharge characteristics of a helium atmospheric pressure plasma jet interacting with a substrate

A 2D (axisymmetric) computational study of the discharge characteristics of an atmospheric pressure plasma jet as a function of gas flow rate was performed. The helium jet emerged from a dielectric tube, with an average gas flow velocity in the range 2.5–20 m s−1 (1 atm, 300 K) in a nitrogen ambient, and impinged on a substrate a short distance dowstream. The effect of the substrate conductivity (conductror versus insulator) was also studied. Whenever possible, simulation predictions were compared with published experimental observations. Discharge ignition and propagation in the dielectric tube were hardly affected by the He gas flow velocity. Most properties of the plasma jet, however, depended sensitively on the He gas flow velocity, which determined the concentration distributions of helium and nitrogen in the mixing layer forming in the gap between the tube exit and the substrate. At low gas flow velocity, the plasma jet evolved from a hollow (donut-shaped) feature to one where the maximum of electron density was on axis. When the gas flow velocity was high, the plasma jet maintained its hollow structure until it struck the substrate. For a conductive substrate, the radial ion fluxes to the surface were relatively uniform over a radius of ~0.4–0.8 mm, and the dominant ion flux was that of He+. For a dielectric substrate, the radial ion fluxes to the surface peaked on the symmetry axis at low He gas flow velocity, but a hollow ion flux distribution was observed at high gas flow velocity. At the same time, the main ion flux switched from N+2 to He + 2 as the He gas flow velocity increased from a low to a high value. The diameter of the plasma ‘footprint’ on the substrate first increased with increasing He gas flow velocity, and eventually saturated with further increases in velocity.